ATF4 AUTO FOCUS & SCANNING SENSOR

The ATF4 sensor provides a reliable auto focusing solution by means of a single laser dot projected from the ATF4 sensor, down through the microscope's objective lens. Proprietary software calculates the distance and direction to focus, resulting in an accurate and rapid auto focusing solution for most types of infinity corrected microscopes.

ATF4 Typical Applications

  • Color Filter inspection and repair
  • Photomask inspection and repair
  • Laser micro-machining
  • Thin Film Transfer glass inspection

ATF4 Special Features

  • High speed measurement rate that supports fast tracking applications
  • Adaptive laser intensity control (from 1% through 99% reflectivity)
  • Supports microscope objective lenses from 2x through 100x; including UV, NUV and NIR
  • Supports static and tracking auto focus applications
  • Provides features to eliminate the reference laser dot from the camera image

Available in Two Versions

  • ATF4 SA -Stand Alone auto focus sensor with Analog Output
  • ATF4 SY - Sautonomous auto focus servo system with controller
The SYS version can be integrated with either an MCM controller for driving z-stages powered by any type of stepper motor (user provided) or MCZ , which is a fully integrated controller and drive that operates two-phase stepper motors.
 

 

Microscope Lens
 

VIS

VIS

VIS

NIR

NIR

NUV

UV

UV

VIS

Magnification

5x

10x

20x

50x

80x

100x

Focus repeatability

+2

+0.5

+0.3

+0.2

+0.15

+0.1 m

Focus accuracy

+6

+1.5

+1

+0.6

+0.4

+0.3 m

Resolution

1

0.5

0.2

0.1

0.06

0.05 m

Capture range

-T/2 +2500

-T/2 +1000

-T/2 +500

-T/2 +250

+100

+100 m

Linear range

-T/2 +500

+250

+100

+50

+20

+20 m

T = LCD glass thickness

 

Auto Focus Sensor Model
 

ATF 4SA

ATF 4SYS

Sensor laser projected beam

single dot

single dot

Auto focus speeds tracking

tracking static

0.0 sec

0.0 sec
 

static

0.2 sec

0.2 sec

Compact sensor size (mm)

50.2 x 45 x 128

50.2 x 45 x 128

Weight (grams)

400

400

Compact controller size (mm)

N/A

35 x 106 x 126

Weight (grams)

400

CMOS sensor

line scan

line scan

Refresh rate maximum

maximum nominal/typical

10 kHz

10 kHz
 

nominal/typical

2 kHz

2 kHz

Laser diode power

660 nm

25 mW

25 mW

 

785 nm

20mW

20mW

Laser safety class

660 nm

II

II

 

785 nm

IIIB

IIIB