ATF5 Auto Focus & Tracking Sensor

When repairing Thin Film Transfer (TFT) arrays there is a rapid transition between highly reflective traces and low reflective ITO electrodes. The single laser dot image used in the ATF4 can become distorted by the differences in reflectivity and hence, prevent focusing.

The ATF5 solves the problem by using seven laser dots in a row to calculate the distance and direction to focus. The seven dots provide enough redundant information so that even if only two or three dot images are read, the ATF5 sensor will still achieve focus.

For setup and configuration changes, the sensor communicates with the master system controller (computer) over a serial communication link.

ATF5 Typical Applications

• TFT array inspection and repair
• Photomask inspection and repair
• Laser micro-machining
• Silicon Wafer inspection

• Reflective and low reflectivity surfaces (down to 1%)
• Transparent and opaque
• Plain, patterned and textured

Optional functions

• Critical dimension measurement
• AOI (Automated Optical Inspection)
• Supports microscope objective lenses from 2x through 100x
• Focusing with programmable offset function

Available in Three Versions

• ATF5 SA"Stand Alone sensor with Analog Output
• ATF5 SYSautonomous auto focus system. Includes controller.
• ATF 5CMautonomous auto focus system for Cell/Module repair. Includes controller.

• ATF5 Dimensions
• Brochure
• Integration Diagrams for MCM & MCZ
• MCM Dimensions