ATF6 Auto Focus & Tracking System

Some auto focussing requirements can exceed the limitations of single or multiple dot laser focussing technology, like those used in the ATF4 and ATF5 sensors. What if the target resides on a speckled or diffuse surface? What if focussing is required while the microscope is moving?

The ATF6 solves these problems by achieving focus with a single laser line that provides a large redundancy of information, making the ATF6 a most reliable auto focusing solution. The dynamic focusing on a moving target is referred to as "Tracking Auto Focus.

The ATF6 has the same footprint and is "pin to pin compatible with the ATF4 and ATF5 sensors. It uses the same Motor Controller Module (MCM) and software for setup and testing.

ATF6 Typical Applications

• Patterned wafer inspection
• Wafer processing
• Photomask inspection and repair
• CVD TFT repair
• Laser micro-machining

• Reflective and diffuse
• Low reflectivity surfaces (down to 1%)
• Transparent and opaque
• Plain, patterned (silicon wafer) and textured
• Supports microscope objectives ranges from 2x through 100x
• Focusing with programmable offset function

Special Application

For three dimensional periodical structures, such as MEMs or touch screens, the user can choose to keep focus on either the substrate or high spots.

Available in Three Versions

• ATF6 SA"Stand Alone sensor, with Analog Output
• ATF6 SYSautonomous auto focus servo system with controller
• ATF 6CMautonomous auto focus system for Cell/Module repair. Includes controller.

• ATF6 Dimensions
• Brochure
• Integration Diagrams for MCM & MCZ
• MCM Dimensions