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LLC4 Specifications |
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Maximum number of lenses |
4 |
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LLC length |
426 mm |
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Lens change time |
1 - 4 |
0.4 sec |
Measured on a unit populated with lenses |
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1 - 3 |
0.3 sec |
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1 - 2 |
0.2 sec |
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Motor type |
Shaft linear motor |
No iron core, thus zero cogging operation; no contact between forcer and shaft |
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Motor weight |
0.6 kg |
Shaft and forcer |
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Motion actuation implementation |
Fixed forcer and fixed encoder head |
No cable track required |
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Encoder |
Linear encoder |
1 m groove pitch, 0.1 m resolution with interpolation |
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Servo type |
Digitally controlled linear servo |
Guaranteed not to oscillate around the destination point |
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Servo positioning accuracy |
0.1 m |
Supports lens change while the gantry is accelerating or decelerating |
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Bearings |
High precision cross-roller |
To eliminate lateral play, bearings are pre-loaded |
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Weight excluding lenses |
7 lb |
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Compliance |
Cleanroom class 10 |
SEMI |
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Electrical |
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Supply voltage |
48 Volts |
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Peak current |
2.5 Amps |
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LLC6 Specifications |
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Maximum number of lenses |
6 |
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LLC length |
576 mm |
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Lens change time |
1 - 6 |
0.5 sec |
Measured on a unit populated with lenses |
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1 - 5 |
0.4 sec |
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1 - 4 |
0.4 sec |
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1 - 3 |
0.3 sec |
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1 - 2 |
0.2 sec |
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Motor type |
Shaft linear motor |
No iron core, thus zero cogging operation; no contact between forcer and shaft |
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|
Motor weight |
0.6 kg |
Shaft and forcer |
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|
Motion actuation implementation |
Fixed forcer and fixed encoder head |
No cable track required |
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|
Encoder |
Linear encoder |
1 m groove pitch, 0.1 m resolution with interpolation |
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|
Servo type |
Digitally controlled linear servo |
Guaranteed not to oscillate around destination point |
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|
Servo positioning accuracy |
0.1 m |
Supports lens change while the gantry is accelerating or decelerating |
|
|
Bearings |
High precision cross-roller |
To eliminate lateral play, bearings are pre-loaded |
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Weight excluding lenses |
9 lb |
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Compliance |
Cleanroom class 10 |
SEMI |
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Electrical |
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Supply voltage |
48 Volts (90 Volts) |
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Peak current |
2.5 Amps |
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LLC8 Specifications |
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Maximum number of lenses |
8 |
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LLC length |
395 mm |
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Lens change time |
1 - 8 |
0.7 sec |
Measured on a unit populated with lenses |
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1 - 7 |
0.6 sec |
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1 - 6 |
0.5 sec |
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1 - 5 |
0.4 sec |
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1 - 4 |
0.4 sec |
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1 - 3 |
0.3 sec |
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1 - 2 |
0.2 sec |
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|
Motor type |
Shaft linear motor |
No iron core, thus zero cogging operation; no contact between forcer and shaft |
|
|
Motor weight |
0.6 kg |
Shaft and forcer |
|
|
Motion actuation implementation |
Fixed forcer and fixed encoder head |
No cable track required |
|
|
Encoder |
Linear encoder |
1 m groove pitch, 0.1 m resolution with interpolation |
|
|
Servo type |
Digitally controlled linear servo |
Guaranteed not to oscillate around destination point |
|
|
Servo positioning accuracy |
0.1 m |
Supports lens change while the gantry is accelerating or decelerating |
|
|
Bearings |
High precision cross-roller |
To eliminate lateral play, bearings are pre-loaded |
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Weight excluding lenses |
12 lb |
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Compliance |
Cleanroom class 10 |
SEMI |
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Electrical |
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Supply voltage |
48 Volts (90 Volts) |
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Peak current |
2.5 Amps |
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LLC2 Specifications |
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Maximum number of lenses |
2 |
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Lens spacing centre to centre |
38 mm |
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Lens change time |
1 - 2 |
2 sec |
Measured on a turret populated with lenses |
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Motor type |
Stepper motor |
No iron core, thus zero cogging operation; no contact between forcer and shaft |
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Motor weight |
0.6 kg |
Shaft and forcer |
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Servo positioning accuracy |
0.1 m |
Supports lens change while the gantry is accelerating or decelerating |
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Bearings |
High precision cross-roller |
To eliminate lateral play, bearings are pre-loaded |
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Weight excluding lenses |
4 lb |
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Compliance |
Cleanroom class 10 |
SEMI |
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Electrical |
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Supply voltage |
24 Volts |
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Peak current |
1 Amps |
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