MIC4-AOI Automated Optical Inspection

MIC4-AOI Typical Applications

The MIC4-AOI Microscope is a complete, autonomous system designed for fast scanning and defect review applications of

  • Bare glass
  • TFT arrays
  • Color filters

MIC4-AOI Special Features

  • Exceptional image quality limited only by the choice of microscope objective lens
  • Sturdy but lightweight, making it suitable for installation on fast accelerating and decelerating gantries
  • Proper choice of components, surface finishing and minimal cabling allows for operation in a class 10 cleanroom environment

MIC4-AOI Special Functions

  • Fast tracking auto focus (ATFx), maintains the microscope in focus regardless of whether it is in motion (scanning) or still
  • Integrated LED field light illumination (white, red, green, blue or yellow) with digitally controlled intensity; suitable for scanning applications
  • Integrated "Z power stage for automatic focussing of the microscope
  • Image forming optics to enable operation with a camera. Optics supports one-third, one-half and two-thirds inch CCD formats
  • Optical filter for removing sensor's reference laser dot from the CCD image

Options

The MIC4-AOI payload can also be fitted with:

  • CCD camera according to customer specifications
  • Complete payload alignment
If WDI provides all the payload components including the camera, the payload comes fully aligned and ready to install. The user does not need to supply components such as the tube lens, illuminator or objective positioner.

Optical Characteristics

Microscope tube clear aperture

25 mm (1 inch)

Maximum image plane diameter

17 mm (0.67 inches)

Supports two-thirds inch CCD format

Tube lens

FL 200 mm

Optimized achromat, AR coated

Tube lens adjustment range

7.5 mm ( 0.33 inches)

Relative to camera position. Not accessible from the outside.

Beam splitter BS1

70%R-30%T

Dielectric beam splitter, flatness: /4

Beam splitter BS3

99%R @ 658 nm

90%T @ visible range

Custom notch filter; 670 nm 30 nm

Camera mount

C-mount

Camera adjustment range

7.5 mm (0.33 inches)

Relative to tube lens position. Accessible from the outside.

Standard objective mount

Mitutoyo type

Can be customized

Optical filters

25mm (1 inch)

One fixed filter holder preceding camera. Two filter capacity.

Precision polarizing filter (PF) installed. Filter removes sensor's laser dot from the image. The PF does not affect image chromaticity.