MIC4-LLM Laser Micro-Machining Microscope

Laser Micro-Machining Microscope

WDI's Laser Micro-Machining Microscope provides:

  • Exceptional image quality.
  • Compatibility with one-third, one-half, two-thirds inch CCD cameras.
  • Very high mechanical stability.
  • Compliance with the cleanroom 100 standard.
  • Compact and low weight.
  • Integrated electronics with minimal cabling.
  • A single point of control and communication.
  • Compliance with SEMI and CE standards.

The basic Laser Micro-Machining Microscope can be purchased in a fully integrated payload (LMM-PL-34) unit which consists of the following components:

Component Name

Model Code

WDI's P/N

1

Inspection and repair microscope head

MIC4

800 610

2

Integrated "Z Power Stage

ZPS

800 635

3

Linear Lens Changer

LLC6

800 600

4

Tracking laser auto focus sensor

ATF xSYS

800 001

5

Integrated White LED field light illuminator

WLED

800 617

6

Multi Function Controller

MFC

800 619

Options

  • Back light LED illuminator with controller
  • YAG laser in accordance with customer specifications
  • CCD camera in accordance with customer specifications
  • Complete payload alignment so it comes ready to use straight from the box

System Diagram

All the components of the AOI Microscope payload are integrated and controlled by a single Multi Function Controller unit.

The YAG laser (not shown in the diagram) comes with a separate controller and is operated independently.

Unique Feature-Selective YAG mirror

The unique feature of WDI's Laser Micro-Machining Microscope is the selective YAG mirror. It is a four notch filter, highly reflective for YAG harmonics (1,064 nm, 532 nm, 355 nm and 266 nm) and transmissive within the visible spectrum. The YAG mirror reflectance characteristic is shown in the graph below:

NOTE:The exact placement of the optical components as well as the microscope mounting facility, is individually customized to match customer requirements and space limitations.

Optical Characteristics

Optical input ports

In A

YAG laser

(In B)

Field light illuminator

Standard internal WLED illuminator

Optical port optional
Optical bi-directional
ports

I/O A

Auto focus sensor

Optical output ports

Out A

Microscope objective

Out B

Camera

C-mount

Tube lenses

YAG laser
FL 200 mm Meniscus;
UV grade fused silica;
15 mm adjustment range

Camera
FL 200 mm; achromat;
broad band multilayer
AR coated; 15 mm adjustment
range

Beam splitters

BS2

Customized for notch YAG mirror

BS3
Custom optical band-pass filter;
670 nm 30 nm; Reflectance @ 670 nm
is 99%; Transmission >90%

BS1

Dielectric beam splitter (70%R-30%T)

Light transmission

In A I/O A

1,064 nm 80% - 90%

532 nm 80% - 90%

355 nm 80% - 90%

266 nm 80% - 90%

In B Out A

~30%

Out A Out B

~70%