MMS Miniature Modular Microscope

The MMS microscope utilizes WDI's proven advanced optics and design for automation while meeting the demands for smaller size and low weight in a rugged microscope capable of handling the harsh environment of manufacturing gantries.

Applications:

  • Inspection and review in micro machining
  • Fast inspection and/or review using tracking auto-focus on large substrates such as LCD panels
  • Automated or semi-automated inspection of research samples in biomedical market
  • Automated or semi-automated inspection of metallurgical samples
  • Inspection of semiconductor wafers including LED
  • Inspection of solar panels and cells

Key Features and Benefits:

  • Advanced optics designed for digital microscopy to achieve maximum imaging performance
  • Rugged industrial design to handle the demands of manufacturing moving gantries
  • Completely modular to allow maximum configuration for a variety of applications and to minimize the compromises typically made in choosing the configuration. This ensures the best possible performance for tough applications
  • Upgradeable to ensure the best performance for future applications
  • Designed for automation to ensure MMS meets the most demanding requirements not only for image quality but for minimal tact time
  • Very compact size and light weight even when fully automated
System Diagram
 

*Standard LED Illuminator Options

Name

Model

Part Number

White LED

WLED

800620

Red LED

RLED

800251

Green LED

GLED

800252

Blue LED

BLED

800253

4 wavelength LED

RGBLED

800608

** Auto-focus integration kit does not include auto-focus sensor. The sensor needs to be ordered separately.

*** Note WDI is planning to develop the following additional options:

  • Navitar zoom lens (6x & 12x) interface
  • Polarizer kit for polarization microscopy
  • DIC (Nomarski) contrast enhancement kit
  • Laser scanning confocal microscope interface for WDI's LSCM

Optical tube

Aperture

23 mm

Infinity space

100 mm

Design length

Tube lens

1x, Field #: 1.25 CCD equiv.

Chromatically corrected & optimized for field flatness. AR coated in VIS range.

0.75x, Field #: 1 CCD equiv.

Olympus 1x, Field #: 1.25 CCD equiv

UIS2, ext. infinity space from 50 to 170 mm

Mitutoyo 1x, Field #: 1.25 CCD equiv

AR coated in VIS range.

Camera adapter

Vertical, C-mount

Camera focus adjustment 5 mm.

Object and image planes are factory axially aligned; no adjustment provided.

Filters

Polarizer & analyzer set;

Slide into illumination and camera arms. Manual angle adjustment

Short-pass edge filter; 645 nm cutoff wavelength

Removes ATF sensor laser spot from camera view. Permanently installed as a part of auto-focus kit.

Objectives

Nominal

1x, 2x, 5x, 10x, 20x, 50x, 100x

Mitutoyo M Plan Apo LWD,

Mounting

Directly to microscope body

Threaded with Mitutoyo thread (JIS-B-7141-1994)

To Z axis actuator

To motorized 2 lens changer

To motorized 5 lens revolver

Optional

Olympus or Nikon lenses

Thread adapters available

Focus

ZAA:

Z axes actuator

Travel

5 mm

Stepper motor driven

With 1/32 micro stepping

MCZ also drives two LED illuminators

Max load

3.5 kg

Max speed

10 mm/s

Max accel.

100 mm/s/s

Max resolution

0.15 mm/step

Pos. feedback

ATF sensor

Motion Controller

MCZ

Auto-focus sensor

ATF4SYS, ATF5SYS, ATF6SYS

Refer to ATF data sheet for details

MCZ:

Auto-focus step-motor controller

Operating voltage

2.5 V

MCZ is equipped with 2 LED channels for controlling LED illuminators. These channels are functionally the same as for CLED.

Current per phase

0.5 A

# of phases

2

mstepping

1/8 1/16 1/32

Illumination

White LED

Coaxial, Kohler, high intensity (70 lm)

Color LED

Coaxial, Kohler, high intensity

Wavelength from NUV to NIR; please inquire

RGB LED

Lamp with 4 color individually controlled LEDs: R, G, B & NIR

Requires CLED & MCZ controller.

Refer to spec sheet for details.

CLED LED controller

Number of LED channels: 3

Current from 0 to 0.8 A adjustable in 10 mA steps. At each current level, 100 PWM steps available for intensity control with no color temperature alteration.

CLED controller is used if ATF and ZAA are not a part of the system.

Xenon flash

Flash duration

2 ms typ.

Typically applied for on-the-fly defect review.

Flash intensity

0.25 j

Max repetition

100 Hz

# of flashes

109

Fiber optic bundle adapter

Fiber bundle diameter 2 to 6 mm.

The user provides fiber bundle and the light source. Fiber bundle has to be randomized

Accessories***

(under development)

LSCM: Laser Scanning Confocal Microscope

Max resolution

1300x1000 pix

S/W configurable

Field number

1 CCD equiv.

Frame rate

10.4 fps

@ maximum resolution

Illumination

Laser diode

Nominal 1550 nm; other l available