Fast Auto-Focus Tracking on TFT arrays

AOI Application Requirement

• In AOI application, the TFT array is scanned in X or Y direction in search of a cause of a line defect.
• Line scan camera is used to localize the defect(s)
• The purpose of the fast AF tracking system is to maintain microscope within its depth of field during scanning motion

For more details please contact WDI.

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