Application of ATF-5 Auto-Focus Sensor to Critical Dimension Measurements on TFT Arrays

• Setting up the CVD parameters, validating the Line Open Repair (LOR), there is a need to measure the thickness profile of the CVD deposited jumper traces.
• The desired jumper trace thickness is - depending on the array type - 0.2 to 0.5 µm (typically 0.3 µm The CVD race thickness should be measured with an accuracy of at least 0.03 µm

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