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WDI’s Laser Auto-Focus ATF6 sensor is an active optical device (incorporating a class II semiconductor laser) designed to provide focusing servo systems with fast feedback signals needed to quickly and accurately focus all types of infinity corrected microscopes.
Unlike the ATF4 and ATF5 the ATF6 is designed for reliable operation on not only specular surfaces but defusing surfaces. This can be accomplished the projection of a line segment onto the specimen. This generates a vast redundancy of focusing information as compared to laser dots and thus assures accurate focusing.

The ATF6 has the same footprint and is “pin to pin” compatible with the ATF-4 and ATF-5 sensors. It uses the same Motor Controller Module (MCM) and software for setup and testing.

• Patterned wafer inspection
• Wafer processing
• Photo-mask inspection and repair
• CVD TFT repair
• Laser micro-machining

• For 3D periodical structures, such as MEMs or touch screens, user may select whether to keep focus on the substrate or tops of the bumps

• The Sensor operates on almost all types of surfaces:
• Reflective and diffusing
• Low reflectivity surfaces (down to 1%)
• Transparent and opaque
• Plain, patterned (silicon wafer) and textured
• ATF6 covers microscope objectives ranges from 2x to 100x
• Focusing with programmable offset function

• ATF6 SA -- Stand alone sensor, with AO
• ATF6 SYS -- Autonomous autofocus servo system with controller

Brochue ATF6 Dimensions Integration Diagrams for MCM & MCZ MCM Dimensions