INTEGRATED "Z" POWER STAGE ZPS
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WDI’s Payload systems can be outfitted with the ZPS. The ZPS is capable of accurately (within the 10x objective DOF) tracking slops of up to 3% (Δz of 3mm per  Δx of 100 mm) at a scanning speed of 200 mm/s.
 

Main Characteristics

Actuation Turret drawer is actuated
Backlash & play cancellation Spring preload in positive z-direction (upward)
Maximum speed 16 mm/s At nominal positional resolution
Maximum acceleration 150 mm/s/s At nominal positional resolution
„Z“ motion range ±7.5 mm From limit switch to limit switch
Motor type
Stepper motor NEMA 17
Lead screw type rotary to linear motion conversion
Motor weight 0.3 kg Motor & lead screw
Servo type Semi closed loop servo Guaranteed not to oscillate around destination point. ATF provides positional feedback
Nominal positional resolution ±0.2 µm / step Positional resolution can be customized
Bearings High precision cross-roller
Bearings are stainless steel type, lubricated with clean room type grease. Bearings are preloaded to eliminate lateral play.
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ATF Sensors
ATF4 Auto Focus & Scanning Sensor
ATF5 Auto Focus & Tracking Sensor
ATF 5CM TFT Cell/Module Sensor
ATF6 Auto Focus & Tracking System
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ATF Sensor Accessories
LED Illuminator System
MCM & MCZ Controllers

Industrial Microscopes
LSCM Laser Scanning Confocal Microscope
MIC4-AOI Automated Optical Inspection
MIC4-LMM Laser Micro-machining

Industrial Microscope Accessories
Integrated "Z" Power Stage ZPS
MFC Multifunction Controller
LLC6/LLC4 Motorized Linear Lens Changer

Assembly Units
Interface for Olympus Microscopes
Interface for Navitar Zoom Lens
VMU / VMU-L Microscopes

Payloads
AOI-MIC-LSCM

Ultra-fast Laser Application

Available Positions at WDI
Available Positions at WDI