MIC4-AOI AUTOMATED OPTICAL INSPECTION
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WDI’s AOI Microscope is designed for fast scanning and defect review applications of a variety of specimen including bare glass, TFT array and colour filter.

It provides exceptional image quality, and is limited only by the selection of the microscope objective lens.
The microscope features a sturdy but lightweight mechanical design making it particularly suitable for installing on fast accelerating/decelerating gantries.

The microscope design supports operation in a class 10 clean-room environment. This is accomplished by appropriate components and surface finish selection as well as reduction of cabling to the absolute minimum.
The AOI microscope (MIC4-AOI) is a complete, autonomous system encompassing the following functions:
  • Fast tracking auto-focus (ATFx) maintaining the microscope in focus regardless whether it is in motion (scanning) of still.
  • Integrated LED field light illumination (white, red, green, blue or yellow) with digitally controlled intensity, suitable for scanning applications
  • Integrated “Z” power stage for automatic focussing of the microscope
  • Image forming optics to facilitate operation with a camera. Optics supports 1/3”, ½” and 2/3” CCD formats
  • Optical filter for removing sensor’s reference laser dot from the CCD image
Optionally the MIC4-AOI Payload can also be fitted with:
  • CCD camera according to the customer’s specification
  • Complete payload alignment.
    • If WDI provides all the payload components, including the camera, the payload comes fully aligned and ready to install.
    • This relieves the user from the need for tuning tube lens, objectives position, illuminator, etc.
The MIC-AOI Payload (AOI-PL-4) consists of the following main components:
 

 

Name

Model Code

WDI’s P/N

1

Inspection/Repair  Microscope Head

MIC4

800 610

2

Integrated “Z” Power Stage

ZPS

800 635

3

Tracking, Laser Auto-Focus Sensor

ATFx SYS

800 001

4

Integrated White LED field light illuminator    

WLED

800 617

5

Multi Function Controller

MFC

800 619

6

Linear Lens Changer

LLCx

800 600

 
 
System Diagram
All the components of the AOI Microscope Payload are integrated and controlled by a single Multi Function Controller unit.
 
 

 

Optical Characteristics

Microscope tube clear aperture

25 mm (1”)

 

Maximum image plane diameter

17 mm (2/3”)

Supports 2/3” CCD format

Tube lens

FL 200 mm

Optimized achromat, AR coated.

Tube lens adjustment range

±7.5 mm (±1/3”)

Relative to camera position. Not accessible from the outside

Beam-splitter BS1

70%R-30%T

Dielectric beam-splitter, flatness: λ/4

Beam-splitter BS3

99%R@658nm

90%T@visible range

Custom notch filter; 670nm ±30nm;

Camera mount

C-mount

 

Camera adjustment range

±7.5 mm (±1/3”)

Relative to tube lens position. Accessible from the outside

Standard objective mount

Mitutoyo type

Can be customized

Optical filters

25mm (1”)

One fixed filter holder preceding camera. Two filters capacity.

Precision polarizing filter (PF) installed. Filter removes Sensor’s laser dot from the image. The PF does not effect image chromaticity.

 
 
 

 

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ATF Sensors
ATF4 Auto Focus & Scanning Sensor
ATF5 Auto Focus & Tracking Sensor
ATF 5CM TFT Cell/Module Sensor
ATF6 Auto Focus & Tracking System
LASS Live Animal Stabilization System

ATF Sensor Accessories
LED Illuminator System
MCM & MCZ Controllers

Industrial Microscopes
LSCM Laser Scanning Confocal Microscope
MIC4-AOI Automated Optical Inspection
MIC4-LMM Laser Micro-machining

Industrial Microscope Accessories
Integrated "Z" Power Stage ZPS
MFC Multifunction Controller
LLC6/LLC4 Motorized Linear Lens Changer

Assembly Units
Interface for Olympus Microscopes
Interface for Navitar Zoom Lens
VMU / VMU-L Microscopes

Payloads
AOI-MIC-LSCM

Ultra-fast Laser Application

Available Positions at WDI
Available Positions at WDI