WDI - Industrial Sensors and Process Automation - Industrial Sensors and Process Automation Wise Device Inc.

MIC4-LMM LASER MICRO-MACHINING

Laser Micro-machining Microscope
WDI's Laser Micro-machining Microscope has been designed to provide:

exceptional image quality
compatibility with 1/3 , 1/2, and 2/3 inch CCD cameras
very high mechanical stability
compliance with the clean room 100 standard
compactness and low weight
integrated electronics with minimal cabling
a single point of control and communication
compliance with SEMI and CE standards

The basic Laser Micro-machining Microscope can be purchased in a fully integrated Payload (LMM-PL-34) unit which consists of the following main components:

	Name	Model Code	WDI’s P/N
1	Inspection/Repair Microscope Head	MIC4	800 610
2	Integrated “Z” Power Stage	ZPS	800 635
3	Linear Lens Changer	LLC6	800 600
4	Tracking, Laser Auto-Focus Sensor	ATF-xSYS	800 001
5	Integrated White LED field light illuminator	WLED	800 617
6	Multi Function Controller	MFC	800 619

Optionally, WDI may provide:

Back light LED illuminator with controller
YAG laser according to customer’s specification
CCD camera according to the customer’s specification
Complete payload alignment, so it comes ready to use “straight from the box“

System Diagram

All the components of the AOI Microscope Payload are integrated and controlled by a single Multi Function Controller unit.

The YAG laser (not shown in the diagram) comes with a separate controller and is operated independently.

Unique Feature-Selective YAG mirror
The unique feature of WDI’s Laser Micro-machining Microscope is the selective YAG mirror. It is a four notch filter, highly reflective for YAG harmonics (1064, 532, 355, 266 nm) and transmissive within the visible spectrum. The YAG mirror reflectance characteristic is shown in the graph below:

YAG Mirror Reflectance - Spectral Characteristic

NOTE:
The exact placement of the optical components as well as the microscope mounting facility is individually customized to match the customer’s requirements and space limitations.

Optical Characteristics
Optical input ports	In A	YAG laser
Optical input ports	(In B)	Field light illuminator	Standard internal WLED illuminator. Optical port optional.
Optical bi-directional ports	I/O A	Auto-focus sensor
Optical output ports	Out A	Microscope objective
Optical output ports	Out B	Camera	C-mount
Tube lenses		YAG laser	FL 200mm; Meniscus; UV grade fused silica; 15 mm adjustment range
Tube lenses		Camera	FL 200mm; Achromat; Broad band multilayer AR coated; 15 mm adjustment range
Beam-splitters		BS2	Custom for notch YAG mirror
		BS3	Custom optical band-pass filter; 670nm ±30nm; Reflectance @ 670nm 99%; Transmission >90%
		BS1	Dielectric beam-splitter (70%R-30%T)
Light transmission	In A -> I/O A	1064nm 80 to 90% 532nm 80 to 90% 355nm 80 to 90% 266nm 80 to 90%
	In B -> Out A	~30%
	Out A -> Out B	~70%

Back

Quick Links

ATF Sensors
ATF4 Auto Focus & Scanning Sensor
ATF5 Auto Focus & Tracking Sensor
ATF 5CM TFT Cell/Module Sensor
ATF6 Auto Focus & Tracking System
LASS Live Animal Stabilization System

ATF Sensor Accessories
LED Illuminator System
MCM & MCZ Controllers

Industrial Microscopes
LSCM Laser Scanning Confocal Microscope
MIC4-AOI Automated Optical Inspection
MIC4-LMM Laser Micro-machining

Industrial Microscope Accessories
Integrated "Z" Power Stage ZPS
MFC Multifunction Controller
LLC6/LLC4 Motorized Linear Lens Changer

Assembly Units
Interface for Olympus Microscopes
Interface for Navitar Zoom Lens
VMU / VMU-L Microscopes

Payloads
AOI-MIC-LSCM

Ultra-fast Laser Application

Available Positions at WDI
Available Positions at WDI