-
Color Filter inspection/ repair
-
Photo-Mask inspection/ repair
-
Laser micro-machining
-
TFT glass inspection
ATF4 Special Features
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High speed measurement rate, supporting fast tracking applications
-
Adaptive laser intensity control (1 to 99% reflectivity)
-
Covers microscope objectives from 2x to 100x, including UV, NUV, and NIR
-
Supports static and tracking auto focus applications
-
Provides features to eliminate the reference laser dot from the camera image
-
ATF4 SA - Stand alone auto focus sensor with AO
-
ATF4 SYS - Autonomous autofocus servo system with controller
|
Microscope Lens |
VIS |
VIS |
VIS NIR |
NIR NUV UV |
UV |
VIS |
|
Magnification |
5X |
10X |
20X |
50X |
80X |
100X |
|
Focus Repeatability |
+2 |
+0.5 |
+0.3 |
+0.2 |
+0.15 |
+0.1μm |
|
Focus Accuracy |
+6 |
+1.5 |
+1 |
+0.6 |
+0.4 |
+0.3μm |
|
Resolution |
1 |
0.5 |
0.2 |
0.1 |
0.06 |
0.05μm |
|
Capture Range |
-T/2 +2500 |
-T/2 +1000 |
-T/2 +500 |
-T/2 +250 |
+100 |
+100μm |
|
Linear Range |
-T/2 +500 |
+250 |
+100 |
+50 |
+20 |
+20μm |
|
Autofocus Sensor Model |
ATF-4SA |
ATF-4SYS |
|
|
|
|
|
Sensor laser projected beam |
single dot |
single dot |
|
|
|
|
|
Autofocus speed: tracking |
0.0s |
0.0s |
|
static |
0.2s |
0.2s |
|
|
|
|
|
Compact sensor size (mm) |
50.2x52x131.9 |
50.2x52x131.9 |
|
Weight(grams) |
400 |
400 |
|
|
|
|
|
Compact controller size (mm) |
N/A |
35x106x126 |
|
Weight(grams) |
|
400 |
|
|
|
|
|
CMOS sensor |
line scan |
line scan |
|
|
|
|
|
Refresh rate - maximum |
10 kHz |
10 kHz |
|
- nominal/typical |
2 kHz |
2 kHz |
|
|
|
|
|
Laser diode power 658nm |
25mW |
25mW |
|
670nm |
7mW |
7mW |
|
785nm |
20mW |
20Mw |
|
|
|
|
|
Laser safety class 658/785nm |
IIIB |
IIIB |
|
670nm |
II |
II |
|
ATF Sensors
ATF Sensor Accessories
Industrial Microscopes
Industrial Microscope Accessories
|
Assembly Units
Payloads
Ultra-fast Laser Application Available Positions at WDI
|
ATF4 Auto Focus & Scanning Sensor