The WDI Laser Auto-Focus ATF5 sensor is an active optical device (incorporating a semiconductor laser) designed to provide focusing servo systems with fast feedback signals needed to quickly and accurately focus all types of infinity corrected microscopes.
The ATF5 projects a multitude of laser dots. Each reference dot is a source of a distance to focus measurement. This redundancy of information improves the sensor accuracy and facilitates reliable operation on patterned media such as TFT arrays or photo-masks.
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TFT Array inspection/repair
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LCD Cell/Module inspection/repair
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Photomask inspection and repair
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Laser micro machining
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Silicon Wafer inspection
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The Sensor operates on almost all types of surfaces:
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Reflective and low reflectivity surfaces (down to 1%)
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Transparent and opaque
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Plain, patterned and textured
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Optional functions:
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Critical dimension measurement
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AOI (automated optical inspection)
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Covers microscope objectives ranges from 2x to 100x
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Focus with programmable offset function
Available in 3 Versions
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ATF5 SA -- Stand alone sensor with AO
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ATF5 SYS -- Autonomous autofocus system, includes controller
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ATF5 CMAutonomous autofocus system for Cell/Module repair, includes controller
The SYS and CM versions can be integrated with either an MCM controller for driving z-stages powered by any type of stepper motor (user provides drive) or MCZ which is a fully integrated controller and drive, which operates 2 phase stepper motors.
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Microscope Lens |
VIS |
VIS |
VIS NIR |
NIR NUV UV |
UV |
VIS |
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Magnification |
5X |
10X |
20X |
50X |
80X |
100X |
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Focus Repeatability |
+2 |
+0.5 |
+0.3 |
+0.2 |
+0.15 |
+0.1μm |
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Focus Accuracy |
+6 |
+1.5 |
+1 |
+0.6 |
+0.4 |
+0.3μm |
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Resolution |
1 |
0.5 |
0.2 |
0.1 |
0.06 |
0.05μm |
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Capture Range |
+2500 |
+1000 |
+500 |
+250 |
+100 |
+100μm |
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Linear Range |
-T/2 500 |
+250 |
+100 |
+30 |
+15 |
+15μm |
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Autofocus Sensor Model |
ATF5-SA |
ATF-5SYS |
ATF-5 CM |
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Sensor laser projected beam |
7 dot |
7 dot |
7 dot |
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Autofocus speed: tracking |
0.0s |
0.0s |
0.0s |
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static |
0.2s |
0.2s |
0.2s |
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Compact sensor size (mm) |
50.9x52x134.9 |
50.9x52x134.9 |
50.9x52x134.9 |
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Weight(grams) |
400 |
400 |
400 |
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Compact controller size (mm) |
N/A |
35x106x126 |
35x106x126 |
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Weight(grams) |
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400 |
400 |
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CMOS sensor |
area scan |
area scan |
area scan |
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Refresh rate - maximum |
2 kHz |
2 kHz |
2 kHz |
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- nominal/typical |
500 Hz |
500 Hz |
500 Hz |
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Laser diode power 658nm |
25mW |
25mW |
N/A |
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670nm |
7mW |
7mW |
N/A |
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785nm |
50mW |
50mW |
50mW |
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Laser safety class 658/785nm |
IIIB |
IIIB |
IIIB |
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670nm |
II |
II |
N/A |
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ATF Sensors
ATF Sensor Accessories
Industrial Microscopes
Industrial Microscope Accessories
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Assembly Units
Payloads
Ultra-fast Laser Application Available Positions at WDI
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ATF4 Auto Focus & Scanning Sensor