Specifically to facilitate cell/module repair, the ATF5CM forces microscope to automatically focus on the surface of the glass where the TFT array is deposited (usually the bottom). This process will not be distracted by reflections from other surfaces within the light path such as the protective film, the polarizer or the glass.
ATF5CM Features

|
Microscope Lens |
VIS |
VIS |
VIS NIR |
NIR NUV UV |
UV |
VIS |
|
Magnification |
5X |
10X |
20X |
50X |
80X |
100X |
|
Focus Repeatability |
+2 |
+0.5 |
+0.3 |
+0.2 |
+0.15 |
+0.1μm |
|
Focus Accuracy |
+6 |
+1.5 |
+1 |
+0.6 |
+0.4 |
+0.3μm |
|
Resolution |
1 |
0.5 |
0.2 |
0.1 |
0.06 |
0.05μm |
|
Capture Range |
+2500 |
+1000 |
+500 |
+250 |
+100 |
+100μm |
|
Linear Range |
-T/2 500 |
+250 |
+100 |
+30 |
+15 |
+15μm |
|
Autofocus Sensor Model |
ATF5-SA |
ATF-5SYS |
ATF-5 CM |
|
|
|
|
|
|
Sensor laser projected beam |
7 dot |
7 dot |
7 dot |
|
|
|
|
|
|
Autofocus speed: tracking |
0.0s |
0.0s |
0.0s |
|
static |
0.2s |
0.2s |
0.2s |
|
|
|
|
|
|
Compact sensor size (mm) |
50.9x52x134.9 |
50.9x52x134.9 |
50.9x52x134.9 |
|
Weight(grams) |
400 |
400 |
400 |
|
|
|
|
|
|
Compact controller size (mm) |
N/A |
35x106x126 |
35x106x126 |
|
Weight(grams) |
|
400 |
400 |
|
|
|
|
|
|
CMOS sensor |
area scan |
area scan |
area scan |
|
|
|
|
|
|
Refresh rate - maximum |
2 kHz |
2 kHz |
2 kHz |
|
- nominal/typical |
500 Hz |
500 Hz |
500 Hz |
|
|
|
|
|
|
Laser diode power 658nm |
25mW |
25mW |
N/A |
|
670nm |
7mW |
7mW |
N/A |
|
785nm |
50mW |
50mW |
50mW |
|
|
|
|
|
|
Laser safety class 658/785nm |
IIIB |
IIIB |
IIIB |
|
670nm |
II |
II |
N/A |
|
ATF Sensors
ATF Sensor Accessories
Industrial Microscopes
Industrial Microscope Accessories
|
Assembly Units
Payloads
Ultra-fast Laser Application Available Positions at WDI
|