ATF 5CM TFT CELL/MODULE SENSOR
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ATF5CM Laser Tracking Auto-focus Sensor for TFT Cell/Module Repair

Specifically to facilitate cell/module repair, the ATF5CM forces microscope to automatically focus on the surface of the glass where the TFT array is deposited (usually the bottom). This process will not be distracted by reflections from other surfaces within the light path such as the protective film, the polarizer or the glass.

ATF5CM Features

 

Microscope Lens

VIS

VIS

VIS

NIR

NIR

NUV

UV

UV

VIS

Magnification

5X

10X

20X

50X

80X

100X

Focus Repeatability

+2

+0.5

+0.3

+0.2

+0.15

+0.1μm

Focus Accuracy

+6

+1.5

+1

+0.6

+0.4

+0.3μm

Resolution

1

0.5

0.2

0.1

0.06

0.05μm

Capture Range

+2500

+1000

+500

+250

+100

+100μm

Linear Range

-T/2 500

+250

+100

+30

+15

+15μm

T = LCD glass thickness
 
 
Autofocus Sensor Model
ATF5-SA
ATF-5SYS
ATF-5 CM
 
 
 
 
Sensor laser projected beam
7 dot
7 dot
7 dot
 
 
 
 
Autofocus speed:                tracking
0.0s
0.0s
0.0s
static 
0.2s
0.2s
0.2s
 
 
 
 
Compact sensor size (mm)
50.9x52x134.9
50.9x52x134.9
50.9x52x134.9
Weight(grams)
400
400
400
 
 
 
 
Compact controller size (mm)
N/A
35x106x126
35x106x126
Weight(grams)
 
400
400
 
 
 
 
CMOS sensor
area scan
area scan
area scan
 
 
 
 
Refresh rate - maximum
2 kHz
2 kHz
2 kHz
- nominal/typical
500 Hz
500 Hz
500 Hz
 
 
 
 
Laser diode power 658nm
25mW
25mW
N/A
670nm
7mW
7mW
N/A
785nm
50mW
50mW
50mW
 
 
 
 
Laser safety class 658/785nm
IIIB
IIIB
IIIB
670nm
II
II
N/A
 
 
 
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Assembly Units
Interface for Olympus Microscopes
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Payloads
AOI-MIC-LSCM

Ultra-fast Laser Application

Available Positions at WDI
Available Positions at WDI