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Ultra Fast
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Capacity 6 or 4 lenses
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Lens change between lenses 1 to 6: 0.5 sec and neighboring 0.2 sec.
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Lens change between lenses 1 to 4: 0.4 sec and neighboring 0.2 sec.
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Clean room class 10 compatible: no abrading components; no cable track
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High lens positional accuracy: ±0.1 μm
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Compact and light weight
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Comes with controller (MCL) accepting RS232 commands from computer
- Inspection microscopes
- Laser micro-machining equipment
- TFT repair
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Metrology equipment
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LLC4 Specification |
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Maximum number of lenses |
4 |
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Lens spacing centre to centre |
38 mm |
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Lens change time |
1 <--> 4 |
0.4 sec. |
Measured on turret populated with lenses |
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1 <--> 3 |
0.3 sec. | ||
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1 <--> 2 |
0.2 sec. | ||
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Motor type |
Shaft linear motor |
No iron core thus zero cogging operation; no contact between forcer and shaft | |
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Motor weight |
0.6 kg |
Shaft + forcer | |
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Motion actuation implementation |
Fixed forcer & fixed encoder head |
No cable track required | |
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Encoder |
Linear encoder |
10 μm groove pitch 0.1 μm resolution with interpolation | |
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Servo type |
Digitally controlled linear servo |
Guaranteed not to oscillate around destination point | |
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Servo positioning accuracy |
±0.1 μm |
Supports lens change while the gantry is accelerating/ decelerating | |
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Bearings |
High precision cross-roller |
Bearings are preloaded to eliminate lateral play | |
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Weight excluding lenses |
7 lb |
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Compliance |
Clean room class 10 |
SEMI | |
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Electrical |
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Supply voltage |
48 Volts |
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Peak current |
2.5 Amps |
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LLC6 Specification |
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Maximum number of lenses |
6 |
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Lens spacing centre to centre |
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38 mm |
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Lens change time |
1 <--> 6 |
0.5 sec. |
Measured on turret populated with lenses |
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1 <--> 5 |
0.4 sec. | ||
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1 <--> 4 |
0.4 sec. | ||
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1 <--> 3 |
0.3 sec. | ||
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1 <--> 2 |
0.2 sec. | ||
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Motor type |
Shaft linear motor |
No iron core thus zero cogging operation; no contact between forcer and shaft | |
|
Motor weight |
0.6 kg |
Shaft + forcer | |
|
Motion actuation implementation |
Fixed forcer & fixed encoder head |
No cable track required | |
|
Encoder |
Linear encoder |
10 μm groove pitch 0.1 μm resolution with interpolation | |
|
Servo type |
Digitally controlled linear servo |
Guaranteed not to oscillate around destination point | |
|
Servo positioning accuracy |
±0.1 μm |
Supports lens change while the gantry is accelerating/ decelerating | |
|
Bearings |
High precision cross-roller |
Bearings are preloaded to eliminate lateral play | |
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Weight excluding lenses |
9 lb |
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Compliance |
Clean room class 10 |
SEMI | |
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Electrical |
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Supply voltage |
48 Volts (90 Volts) |
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Peak current |
2.5 Amps |
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ATF Sensors
ATF Sensor Accessories
Industrial Microscopes
Industrial Microscope Accessories
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Assembly Units
Payloads
Ultra-fast Laser Application Available Positions at WDI
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ATF4 Auto Focus & Scanning Sensor