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Main Characteristics |
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Actuation |
Turret drawer is actuated |
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Backlash and play cancellation |
Spring pre-load in positive z-direction (upward) |
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Maximum speed |
16 mm/sec |
At nominal positional resolution |
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Maximum acceleration |
150 mm/sec/sec |
At nominal positional resolution |
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"Z motion range |
7.5 mm |
From limit switch to limit switch |
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Motor type |
Stepper motor NEMA 17 |
Lead screw type rotary to linear motion conversion |
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Motor weight |
0.3 kg |
Motor and lead screw |
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Servo type |
Semi-closed loop |
Guaranteed not to oscillate around destination point. ATF provides positional feedback. |
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Nominal positional resolution |
0.2 m/step |
Positional resolution can be customized |
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Bearings |
High precision cross-roller |
Bearings are stainless steel type, lubricated with cleanroom type grease. Bearings are preloaded to eliminate lateral play. |
ZPS Integrated Z Power Stage
WDI's payload systems can be outfitted with the ZPS. The ZPS is capable of accurately tracking slopes of up to 3% (Delta Z of 3 mm per Delta X of 100 mm) at a scanning speed of 200 mm/sec, all within the 10x objective's Depth of Field.