Reflective Dark Field (RDF) illumination, a powerful observation and inspection method in optical microscopy, uses oblique light to allow visualization and imaging of structures normally not seen. Many applications such as dust and scratch defect detection in FPD and semiconductor manufacturing make use of RDF. WDI’s new patent pending RDF illuminator technology provides significant improvements over existing techniques and integrates with our current line of single objective and multi objective PFA MMS technology to provide customers with an automated BF/DF imaging platform.

All PFA RDF Illuminators feature:

  • Dedicated separate LED illumination source allows simultaneous reflected BF/DF illumination or fast switching between them

  • Ten times greater object of interest detectability, at the sub micron level, over conventional RDF illumination techniques

  • Compatibility with Mitutoyo BD Plan APO or BD Plan APO HR objectives lenses (other objective lens support available upon request)

  • Dedicated PFABUS™ COB controller, providing power and controls for intensity, timing, and mode of operation

  • Several modes of operation including DC (Direct Current), Pulse Width Modulation (PWM) along with two external trigger modes (Pulse Follow and Pulse Trigger)


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PFA – Modular Microscopy System

Next generation autofocus and modular microscopy system coupling the world’s fastest most advanced autofocus technology with integrated automation components to create the perfect microscopy system solutions.

All PFA MMS Systems feature:

  • NEW PFA autofocus sensor with upgraded and improved optics, imaging, processing and communication hardware and capabilities

  • PFABUS™ communication between components which increases reliability, speed and ease of integration

  • PFA components including integrated control technology that eliminate external devices and messy cabling

  • Gigabit Ethernet and a Linux OS providing greater speed and enhanced capabilities